Infineon Technologies researchers have used and modified a CVD (Chemical Vapour Deposition)process to grow carbon nanotubes at selected locations on 6-inchsilicon wafers.

According to Dr Franz Kreupl,a nanoteam researcher, parameters such as temperature and materials are compatible with the standard processes used in semiconductor manufacturing.

Researchers are considering substituting metal conductors in chips with carbon nanotubes or replacing silicon with cheaper glass in microelctronics.
A US organization, Nanolab, is also working on a similar CVD process to produce single walled carbon nanotubes.