MINATEC

Diamond is an outstanding material thanks to its physical properties: thermal conductivity, transparency, bio-compatibility, electronic structure, electrochemical window. He is nowadays already used for particles detection or water purification. This material was also successfully integrated at LETI as a buried insulator for thermal dissipation improvement of Integrated Circuits.

Diamond is an outstanding material thanks to its physical properties: thermal conductivity, transparency, bio-compatibility, electronic structure, electrochemical window. He is nowadays already used for particles detection or water purification. This material was also successfully integrated at LETI as a buried insulator for thermal dissipation improvement of Integrated Circuits.

The purpose of this thesis is to study the potential of diamond as a doped electrode for bio or particles sensing co-integrated with a Si nano-electronics. It will include different parts: design and simulation of tests structures for diamond integration, definition of the integration flow, fabrication in clean room and electrical characterization.