MINATEC

Performances and fabrication improvements of MEMS yield to an increase of their miniaturization. While their dimension shrink the stress and deformation to which they are submitted become more and more important. So there is a real need to characterize and monitor Microsystems deformations and link them to their performances and integrity at fabrication time.

Performances and fabrication improvements of MEMS yield to an increase of their miniaturization. While their dimension shrink the stress and deformation to which they are submitted become more and more important. So there is a real need to characterize and monitor Microsystems deformations and link them to their performances and integrity at fabrication time. The aim of the thesis is to implement a characterisation toolbox (technique + model) which could be use in-line to monitor the dimension changes and mechanical properties of Microsystems and their constitutive materials. A complementary part will include numerical experiments to understand furthermore the effects of fabrication conditions on MEMS mechanical properties.