Academic Research in Rhone-Alpes (Lyon-Grenoble) concentrates into two federations of laboratories: FMNT and ELESA. These two federations share a commun research axis on Microsystems. The aim is to join forces and pluri-disciplinary competences as well as to share Clean Rooms know-how and means. This is done in close contact with the future MINATEC Pole in Grenoble. This dynamic and active action is presented as well as four different examples of research done in some laboratories of the federations.

General Introduction
Gilbert REYNE, LEG-ENSIEG (download presentation 2,5Mb)

General Introduction Microsystems research Axis
common to the two federations: FMNT and ELESA.
Jean-Michel Dion, ELESA (download presentation 1,97MB); Gérard Ghibaudo, FMNT (download presentation 914 kb)

Nanostructure of Porous Silicon and Microsystems
Daniel Barbier, LPM, INSA Lyon.

Reliability of MEMS-RF: Challenge and Methods
Jumana Boussey-Said, IMEP, INPG, Grenoble. (download presentation 2.3 Mb)

III-V semiconductor-based micro optoelectromechanical systems (MOEMS III-V)
Michel Garrigues, LEOM, ECL, Lyon.(download presentation 1.6 Mb)

MAGMAS (MAGnetic Micro-Actuators and Systems)
Orphée Cugat, Jérôme Delamare & Gilbert Reyne, LEG, INPG, Grenoble.(download presentation 4.5 Mb)