The Rhône-Alpes region ranks fourth in Europe and second in France for research and development. Many fields are covered, including electronics, optoelectronics, optics, biology, chemistry, materials and microsystems. Minatec, located at the heart of Rhône-Alpes, is a key player in the R&D process.The prime objective of this unique centre is to provide industry with the skills, innovation and technology on which to build tomorrow's economic growth.
We may safely assume that Minatec will attract a large number of conventional industries, for which innovation is vital to their future viability. The presence of world leaders in the semiconductor market has prompted the formation of a dense industrial concentration of subcontractors and service providers, not so well known to the general public but essential to the future development of high technology processes. Typical examples of this trend are the arrival of Novellus, a firm specializing in chemical-vapour deposition, or Jem Europe and Axcelis Technologies.
Drawing on the expertise of the Minatec centre which ranges from basic science to the most advanced technology developments, new semiconductor start-ups will certainly be appearing in coming years. But looking beyond that, Minatec's skills will enlarge their scope, bringing valuable advances to many fields such as traceability, thanks to RFID tags, or healthcare, with implantable microsystems.
Although conventional microelectronics is at the root of many advanced technology R&D initiatives, we are nevertheless seeing considerable diversification in demand from sectors less used to fast-track innovation, as we can see from the Metis project. All these technologies, and the resulting products, represent an exciting and excellent promising field for industry to explore, as this newsletter will show.

Pierre Benech, assistant-director of Grenoble Graduate School of Physics (ENSPG - INP Grenoble)

Thanks to ever increasing miniaturization in electronics, a trend that started with the invention of the transistor, electronic devices can now be integrated in our bodies.
The first pacemakers appeared in 1958. Doctors started fitting automatic defibrillators in 1980 and the ViaVoice voice recognition system was launched in 1997. At the end of the 1980s numerous research centres joined the adventure and all over the world projects have sprung up to care for people.
But how much of these microsystems are actually implanted and what are the key difficulties facing pioneers? A microsystem requires sensors to register physiological parameters, minute data processing capability, actuators to trigger a response, a power source (in all cases) and transmission resources (depending on the application). Each of these components is a challenge in itself, as can be seen from recent examples. In this respect the traditional divisions between biology, chemistry, physics and mathematics make little sense, as the parameters and constraints are interdependent. Work is therefore project-oriented, bringing together research teams as in Grenoble with Leti, Inserm, CNRS, INRIA and the universities. One of Minatec's key strengths is that it provides a tangible framework – in the form of the centre itself – for this approach to work. But on top of their specific expertise, partners must learn to understand the language and concepts of their fellows, essential to pushing back the limits of technology. The higher education establishments, notably UJF and INP Grenoble, play a fundamental role in this process. Now that French universities have adopted the same threetiered degree system as the rest of Europe (BA, MA, PhD), students choose to major in their core skill, with another area of interest as their minor. From the outset they appreciate the need for dialogue and learn to link concepts in various disciplines. Among others, students on the Instrumentation for Biotechnology course at INP Grenoble contribute their enthusiasm and abilities to such projects, as part of internships and theses carried out at CEA or CHU in Grenoble. However universities are not only involved in initial training. Through their work in continuous training, and the close ties between researchers and faculty members, they facilitate and organize the transfer and acquisition of scientific knowledge by a much wider public.
Microsystems for healthcare are a good illustration of contemporary science, which despite its inevitable complexity, is driven by people's demands.

Corinne Mestais (Léti-DTBS)
Franz Bruckert (LMGP - INP Grenoble)

Neurocom
The Neurocom project aims to produce a high-density (1,000 to 2,000 channels) array of micro-electrodes for recording and stimulating networks of live neurons with good spatial control and focus.
The partners in the project, which has qualified for RMNT certification, are Memscap and Bio-Logic, CNRS, LNR, Paris Chamber of Commerce and Industry represented by the ESIEE group and Leti.
The microsystem will have many applications in neuroscience for understanding how large groups of neurons work, but also in pharmaceuticals for screening drugs for neurological diseases, the development of neuroprostheses, and the design of new devices to interface between the human brain and machines.



Actidom
Motion capture and actimetry may be used for monitor- ing senior citizens at risk in their daily life, in order to detect any change in their degree of dependency (Actidom project). But they may also be used to prevent cardiovascular disease (My Heart project funded by the Sixth European R&D Framework Programme), to detect epilepsy and prevent attacks, and to help control artificial limbs for patients suffering from motor disabilities. The Actidom project, which is jointly funded by France Telecom R&D, with LI2G-GPSP-UJF, TIMC and Teamlog, uses the Trident miniature attitude detector originally developed by Leti. It is based on MEMS sensors such as accelerometers and magnetometers, with a data-merge algorithm to determine the movements and attitude of the entire body or just specific limbs. The Trident sensor is located on the patient's trunk, detecting breathing and heart beats. The next step in the project involves miniaturizing the sensor and making it autonomous (contactless connection).

The Metis initiative started in Rhône- Alpes in October 2004, involving Minatec and five textile and paper firms.

This initiative started with various firms and the local authorities, the aim being to assist "conventional" industry in keeping pace with a changing environment. The firms, which all work in highly technical papers or textiles, realized that the next major change in their business would be the move to manufacturing materials integrating complex active and passive functions.
The previous change, from conventional to technical fabrics, was driven by the arrival of new materials (technical fibres) with updated production techniques. Development in this field was supported by textile firms and suppliers of natural and artificial fibres.
The latest change, from technical to technological fabrics, requires multidisciplinary skills and substantial investment in research, beyond the reach of most textile firms, which are often relatively small organizations. The idea behind Metis was to form a team pooling the skills and resources of various firms and a micro and nanotechnology research centre.
Many of Minatec's activities can benefit applications on flexible substrates, notably textile and paper:
• nanomaterials: production and implementation;
• large-area polymer electronics, RFID;
• microsystem technologies: sensors, communications;
• energy technology: generation, storage;
• development of complete systems: applications in healthcare and communications.

But the key strength of Metis is to mix skills and know-how from the worlds of industry and research. Various types of project are expected to emerge from this encounter:

Development of new textile and paper productscapitalizing on technological developments at Minatec, working to industrial specifications:
• use of functionalized nanoparticles for fibres and textile surfaces;
• integration of motion and/or positioning sensors in garments for monitoring applications in sport or healthcare;
• development of biochemical analysis sensors integrated in textile;
• development of energy sources compatible with flexible substrates. Some of these projects are being carried out under the 5th and 6th European R&D Framework Programmes.

Development of new processes based on the know-how and flexible substrate production processes mastered by Metis industrial partners: printing, coating, calendering and laminating techniques.
Joint developments will lead to the emergence of tools corresponding to the micro and nanotechnology production specifications developed by Minatec: polymer electronics, RFID, energy components. The ultimate aim is to invent a whole new industry focussing on production of low-cost, very large area active components.
To achieve this objective Metis has opted to bring together a limited number of firms all targeting technical, high added value markets, but without any direct competition between them.
The introduction of new partners must preserve these initial priorities, essential to open and effective exchange.

I. Chartier (Leti - Optronics Department

Progress in CMOS silicon microtechnology over the last 10 years has paved the way for new applications, often representing a significant break from traditional techniques
One particularly striking case is identification and traceability, with the emergence of contactless smart cards for identifying people and electronic tags for keeping track of objects. Two major advances have enabled such devices to attain the levels of performance required for viable industrial products. First the power consumption of bulk CMOS integrated circuits has been substantially reduced, making it much easier to introduce remote power systems. Second it is now possible to design and produce monolithic hybrid circuits implementing digital and radiofrequency functions on relatively low-cost CMOS technology operating at high (13.56MHz) and ultra-high (2.45GHz) frequencies.

Prospect of massive output
The two types of product – contactless cards and RFID tags – have the potential for very large production volumes, simply because they could find their way onto every person or object. Given the constraints on cost, global interoperability and performance, Leti and INP Grenoble have undertaken R&D work on various technical issues, their aim being to further enhance the products in terms of fabrication and applications.
The following lines of short and medium-term research are particularly noteworthy:
• improvement of the performance-power ratio by introducing technologies such as SOI;
• higher speeds on contactless connections, thanks to more effective design techniques yielding more powerful transmitter-receiver assemblies with lower power consumption;
• development of powerful, budget-conscious antennas on a wide variety of specific media, with scope for operating in hostile electromagnetic environments;
• use of non-volatile memory with much shorter write cycles than conventional EEPROM, thanks to the development of MRAM and PC-RAM ;
• greater component security, through integration of micro-energy sources using Above-IC technology, as with solid state microbatteries;
• addition of microsensors to detect attempts to hack the circuit, and to monitor the device's environment (temperature, shocks).

Long-term research: finding an economical concept

Looking further ahead research is envisaging radically different solutions for mass fabrication processes. Both smart cards and RFID tags have a relatively large surface, but low processing capability compared with the processors driving our PCs. By combining emerging technologies in organic electronics and ultrafine, ultrafast inkjet printing it should be possible to cut costs substantially with large scale batch production. Leti is working on the development and improvement of such processes as part of national (RTB) and European projects. At INP Grenoble, LCIS is carrying out several projects to optimize the design of integrated antennas for RFID tags.
In this field relations with industry also pass through standards bodies, in particular ISO. Leti and INP Grenoble contribute to the work of these organizations as internationally recognized experts.
Lastly there is close, ongoing cooperation with the Traceability Competence Centre in neighbouring Valence.

Smaïl Tedjini (ESISAR/LCIS)
et François Vacherand (Léti/DCIS)

A key agreement is signed by Michael Fancher, Director for Economic Outreach at Albany NanoTech/CNSE, Jean Gaulin, President of the Board of NanoQuebec and Bernard Barbier, Director of CEA-Leti.

A tripartite transatlantic agreement in research On 26 May CEA-Leti signed a tripartite agreement with NanoQuebec and the College of Nanoscale Science and Engineering (CNSE) at Albany University. This venture will create the world's largest nanotechnology research platform.
CNSE has one of the largest nanoelectronics research infrastructures in the academic world and is involved in partnerships with major corporations such as IBM, General Electric and AMD. Over the last few years NanoQuebec has developed unique expertise in joint actions, thanks to which Quebec has become Canada's top centre for nanotechnology.
Under the terms of the agreement the three partners will be linking up their respective networks – encompassing researchers, firms and public bodies – and launching joint programmes. In particular there is provision for a call for proposals to encourage hybrid cooperation, mutual promotion of technological skills in partner regions, and the organization of annual inter-regional events.
There are also plans for targeted collaboration projects with specific technical objectives: alongside CNSE, CEA will be giving priority to work on ultimate lithography whereas with NanoQuebec cooperation will concern the dissemination of micro and nanotechnology in conventional French and Canadian industry. Lastly the three partners have undertaken to promote the responsible use of nanotechnology.
The three bodies bring together more than 5,000 researchers and 30,000 sq m clean room space.

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